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发明名称
EXHAUSTION SYSTEM FOR ULTRAAHIGH VACUUM UNIT
摘要
申请公布号
JPS5397763(A)
申请公布日期
1978.08.26
申请号
JP19770012860
申请日期
1977.02.08
申请人
NIPPON ELECTRON OPTICS LAB
发明人
AIHARA RIYUUZOU;SAITOU SHIYUUICHI;TAMURA NOBUAKI
分类号
H01J37/18;H01J37/26
主分类号
H01J37/18
代理机构
代理人
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