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发明名称
摘要
申请公布号
JPS53105678(U)
申请公布日期
1978.08.25
申请号
JP19770009817U
申请日期
1977.01.28
申请人
发明人
分类号
H01L21/60;H01L21/58;(IPC1-7):H01L21/58
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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