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经营范围
发明名称
THIN FILM COATER
摘要
申请公布号
JPS5397041(A)
申请公布日期
1978.08.24
申请号
JP19770011400
申请日期
1977.02.03
申请人
MITSUBISHI ELECTRIC CORP
发明人
KINOSHITA YASUO
分类号
B05C11/08;B05C9/02;B05D1/40;G03C1/74;G03F7/16;H01L21/027;H01L21/312
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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