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发明名称
GENERATING SYSTEM FOR ELECTRON BEAM DRAWING SIGNAL
摘要
申请公布号
JPS5396763(A)
申请公布日期
1978.08.24
申请号
JP19770011451
申请日期
1977.02.04
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
SHIBAYAMA AKINORI;IWATA ATSUSHI
分类号
H01L21/027;H01L21/26
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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