FORMATION METHOD OF PATTERN FOR LIFTTOFF,申请号JP19770011061-传众专利搜索

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发明名称	FORMATION METHOD OF PATTERN FOR LIFTTOFF
摘要
申请公布号	JPS5396672(A)	申请公布日期	1978.08.24
申请号	JP19770011061	申请日期	1977.02.03
申请人	FUJITSU LTD	发明人	YAMAMOTO SUMIO
分类号	H01L21/306;H01L21/302	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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