| 摘要 |
<p>PURPOSE:To enhance reproducibility by a method wherein, when a raw-material solution composed mainly of tin chloride is sprayed toward the surface of a heated insulating substrate and an oxide metal film is formed on the surface of the substrate, it is sprayed intermittently. CONSTITUTION:When a raw-material solution composed mainly of tin chloride is sprayed toward the surface of a heated insulating substrate and an oxide metal film is formed on the surface of the substrate, it is sprayed intermittently. Thereby, a film quality of a resistance is stabilized; it is possible to easily obtain the resistance whose irregularity in a resistance value is small, whose irregularity in a resistance temperature coefficient is small and which is stable; it is possible to enhance its reliability and productivity.</p> |
