| 摘要 |
PURPOSE:To suppress generation of a ring-shaped resonator composed of flat platelike electrode surfaces, a totally reflecting mirror and a partially reflecting mirror and to improve the quality of a beam by providing an uneven part and a nonreflection coating on the surfaces of opposite inner faces of the flat platelike electrodes. CONSTITUTION:An uneven part 20 or a nonreflection coating 21 is provided on the surfaces of opposite inner faces of a pair of flat platelike electrodes 12a and 12b disposed oppositely in parallel in a housing 5, or a shielding protective wall 22 is provided on the opposite inner faces of the electrodes. Thus, laser lights 11b and 11c which should be reflected in a conventional device are scattered by the uneven part 20 on the surface of the electrodes 12a, 12b, and a ring-shaped resonator composed of flat platelike electrode surfaces, a totally reflecting mirror and a partially reflecting mirror in the conventional device is not composed. Accordingly, only the laser light 11a is output from the gas laser device to obtain the beam of high quality. |
