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发明名称
EINRICHTUNG ZUR BESTRAHLUNG EINER ZIELOBERFLAECHE MIT EINEM VARIABLEN ELEKTRONENSTRAHL, INSBESONDERE ELEKTRONENSTRAHLGENERATOR, ZUR HERSTELLUNG VON HALBLEITER-BAUELEMENTEN
摘要
申请公布号
DE2805602(A1)
申请公布日期
1978.08.17
申请号
DE19782805602
申请日期
1978.02.10
申请人
BURROUGHS CORP.
发明人
EDMOND WOLFE,JOHN
分类号
H01J37/21;H01J37/30;H01J37/304;H01J37/305;H01L21/027;(IPC1-7):H01J37/30;H01L21/26
主分类号
H01J37/21
代理机构
代理人
主权项
地址
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