| 摘要 |
An ion-emission microanalyzer microscope, comprising a vacuum chamber housing an ion source with a focusing system for bombarding the surface of an object under investigation. In addition, arranged along the beam of secondary ions emitted by the bombarded surface of the object under investigation, in the vacuum chamber, are an immersion objective, an aperture diaphragm, an ion-optical converter, a mass filter, and an ion detector. The ion-optical converter has a through opening coaxial with the secondary ion beam, performing the function of an aperture for separating an image element. Outside the vacuum chamber, there is a recording device connected to the output of the ion detector.
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