ETCHING METHOD OF ALLOY SEMIICONDUCTOR,申请号JP19770007437-传众专利搜索

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发明名称	ETCHING METHOD OF ALLOY SEMIICONDUCTOR
摘要
申请公布号	JPS5392346(A)	申请公布日期	1978.08.14
申请号	JP19770007437	申请日期	1977.01.25
申请人	FUJITSU LTD	发明人	UEDA RIYUUICHI
分类号	C23F1/10;C23F1/00;H01L21/302;H01L21/308	主分类号	C23F1/10
代理机构		代理人
主权项
地址

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