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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPS5391664(A)
申请公布日期
1978.08.11
申请号
JP19770005936
申请日期
1977.01.24
申请人
HITACHI LTD
发明人
ITOU TATSU
分类号
C23C16/50;C23C16/509;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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