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经营范围
发明名称
MANUFACTURING EQUIPMENT FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5391580(A)
申请公布日期
1978.08.11
申请号
JP19770005903
申请日期
1977.01.24
申请人
OKI ELECTRIC IND CO LTD
发明人
SUGANUMA SADAO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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