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发明名称
Epitaxial deposition of semiconductor materials
摘要
申请公布号
US3345223(A)
申请公布日期
1967.10.03
申请号
US19650490814
申请日期
1965.09.28
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
REISMAN ARNOLD;BERKENBILT MELVIN;PAPAZIAN SATENIK A.;CHEROFF GEORGE
分类号
C30B25/02
主分类号
C30B25/02
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代理人
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