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发明名称
MASK STRUCTURE
摘要
PURPOSE:To achieve the improvement in the scale of integration of pellets by arraying regular hexagonal connection holes.
申请公布号
JPS5390765(A)
申请公布日期
1978.08.09
申请号
JP19770005189
申请日期
1977.01.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIRAO TADASHI
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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