APPARATUS FOR MEASURING SPECIFIC RESISTANCE OF RESISTIVE MATERIALS AT MICROCIRCUIT MANUFACTURING,申请号SU19762194618-传众专利搜索

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发明名称	APPARATUS FOR MEASURING SPECIFIC RESISTANCE OF RESISTIVE MATERIALS AT MICROCIRCUIT MANUFACTURING
摘要
申请公布号	SU618872(A1)	申请公布日期	1978.08.05
申请号	SU19762194618	申请日期	1976.12.04
申请人	ARESHKIN ALEKSEJ A,SU;AFANASEV ANATOLIJ A,SU	发明人	ARESHKIN ALEKSEJ A,SU;AFANASEV ANATOLIJ A,SU
分类号	H01L21/66;G01R1/067;H01L21/70;(IPC1-7):H05K1/04	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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