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发明名称
PRODUCTION OF INTEGRATED CIRCUIT
摘要
申请公布号
JPS5389381(A)
申请公布日期
1978.08.05
申请号
JP19770002889
申请日期
1977.01.17
申请人
HITACHI LTD
发明人
SUNAMI HIDEO
分类号
H01L23/522;H01L21/28;H01L21/768
主分类号
H01L23/522
代理机构
代理人
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地址
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