| 发明名称 |
PIEZOELEKTRISCHER KRISTALLINER FILM |
| 摘要 |
Piezoelectric crystalline films which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of vanadium. These films are prepared by radio-frequency sputtering. |
| 申请公布号 |
DE2804000(A1) |
申请公布日期 |
1978.08.03 |
| 申请号 |
DE19782804000 |
申请日期 |
1978.01.31 |
| 申请人 |
MURATA MANUFACTURING CO.,LTD. |
发明人 |
OGAWA,TOSHIO;MASHIO,TASUKU;NISHIYAMA,HIROSHI |
| 分类号 |
C04B35/453;C01G9/02;C23C14/08;C30B28/12;C30B29/16;H01L41/18 |
主分类号 |
C04B35/453 |
| 代理机构 |
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