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发明名称
HEAT TRAETMENT METHOD OF COMPOUND CRYSTAL
摘要
申请公布号
JPS5387164(A)
申请公布日期
1978.08.01
申请号
JP19770002056
申请日期
1977.01.11
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ARIGA KOUZOU
分类号
H01L21/22;H01L21/265;H01L21/324
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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