发明名称 ROTARY FLUID APPLICATOR
摘要 <p>Apparatus for applying a fluid medium to a workpiece, the apparatus comprising a chamber and a pair of rotatably mounted disks in the chamber. A workpiece is suspended in the chamber and the disks are provided with a plurality of apertures therein to create a flow of fluid media from one surface of the disk at an oblique angle to the workpiece. The disks are provided with blade-like scallops or notches along their periphery so that a fluid medium applied thereto will effect rotation thereof to create relative movement between the disk and the workpiece.</p>
申请公布号 CA1035574(A) 申请公布日期 1978.08.01
申请号 CA19740211477 申请日期 1974.10.16
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HANSEN, HOWARD E.;STRAUB, ROBERT J.;TUCZYNSKI, EDWARD M.
分类号 H01L21/304;F26B21/00;H01L21/00 主分类号 H01L21/304
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