发明名称 |
ROTARY FLUID APPLICATOR |
摘要 |
<p>Apparatus for applying a fluid medium to a workpiece, the apparatus comprising a chamber and a pair of rotatably mounted disks in the chamber. A workpiece is suspended in the chamber and the disks are provided with a plurality of apertures therein to create a flow of fluid media from one surface of the disk at an oblique angle to the workpiece. The disks are provided with blade-like scallops or notches along their periphery so that a fluid medium applied thereto will effect rotation thereof to create relative movement between the disk and the workpiece.</p> |
申请公布号 |
CA1035574(A) |
申请公布日期 |
1978.08.01 |
申请号 |
CA19740211477 |
申请日期 |
1974.10.16 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HANSEN, HOWARD E.;STRAUB, ROBERT J.;TUCZYNSKI, EDWARD M. |
分类号 |
H01L21/304;F26B21/00;H01L21/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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