Scanning apparatus for cross-sectional inspection equipment

摘要

A scanning apparatus for cross-sectional inspection equipment in which an X-ray source and a detector, which are arranged facing each other with an object in between, reciprocate along and rotate about a required cross-sectional plane of the object. The X-ray source and detector are mounted on a movable frame which is provided on a rotating disc and reciprocate, after being rotated through a small rotating-angle of the rotating disc by means of one drive source and mechanical mechanism. Thus, accurate operating timing and simplified construction are achieved.