发明名称 |
PRODUCTION OF CHARGE TRASNFER DEVICE |
摘要 |
PURPOSE:To readily and directly judge the goodness or not of etching of transfer electrodes by forming probing pads for measurement at the time of forming the transfer electrodes and electrically measuring the isolation condition of the electrodes. |
申请公布号 |
JPS5386585(A) |
申请公布日期 |
1978.07.31 |
申请号 |
JP19770001153 |
申请日期 |
1977.01.11 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
TERAKAWA KAZUO |
分类号 |
H01L29/762;H01L21/339;H01L29/768 |
主分类号 |
H01L29/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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