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经营范围
发明名称
APPARATUS FOR PRODUCING FINE PARTICLE FILM
摘要
申请公布号
JPH02209469(A)
申请公布日期
1990.08.20
申请号
JP19890029633
申请日期
1989.02.10
申请人
CANON INC
发明人
TAKAGI HIROTSUGU;IMANISHI YUMIE;OGAWA HIROKO
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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