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发明名称
OPTISCHE VORRICHTUNG
摘要
申请公布号
DE2802416(A1)
申请公布日期
1978.07.27
申请号
DE19782802416
申请日期
1978.01.20
申请人
CANON K.K.
发明人
SUZKI,AKIYOSHI
分类号
H01L21/30;G02B26/12;G03F9/00;G05D3/12;H01L21/027;(IPC1-7):G02B27/17
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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