EXPOSURE METHOD OF ELECTRONIC BEAM,申请号JP19760159475-传众专利搜索

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发明名称	EXPOSURE METHOD OF ELECTRONIC BEAM
摘要
申请公布号	JPS5384473(A)	申请公布日期	1978.07.25
申请号	JP19760159475	申请日期	1976.12.29
申请人	FUJITSU LTD	发明人	ITOGA MASANAO
分类号	H01L21/027;H01L21/302	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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