发明名称 |
OXIDE ETCHANT |
摘要 |
<p>A composition for selectively etching inorganic oxides with respect to titanium includes an oxidizing agent, a buffered aqueous solution of hydrofluoric acid, a tetrazolium salt and sufficient organic solvent to make a stable solution. During the etching process, tetrazolium cations are reduced to form an etch insoluble formazan dye which deposits upon negatively charged(cathodic)sites, thereby suppressing galvanic corrosion.</p> |
申请公布号 |
CA1035258(A) |
申请公布日期 |
1978.07.25 |
申请号 |
CA19740204953 |
申请日期 |
1974.07.17 |
申请人 |
WESTERN ELECTRIC COMPANY, INCORPORATED |
发明人 |
ERDMAN, WILLIAM C.;GARBARINI, VICTOR C. |
分类号 |
C01B33/12;C23F1/10;C23F11/04;C23F11/14;G03F7/30;H01L21/00;H01L21/308;H01L21/311 |
主分类号 |
C01B33/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|