发明名称 OXIDE ETCHANT
摘要 <p>A composition for selectively etching inorganic oxides with respect to titanium includes an oxidizing agent, a buffered aqueous solution of hydrofluoric acid, a tetrazolium salt and sufficient organic solvent to make a stable solution. During the etching process, tetrazolium cations are reduced to form an etch insoluble formazan dye which deposits upon negatively charged(cathodic)sites, thereby suppressing galvanic corrosion.</p>
申请公布号 CA1035258(A) 申请公布日期 1978.07.25
申请号 CA19740204953 申请日期 1974.07.17
申请人 WESTERN ELECTRIC COMPANY, INCORPORATED 发明人 ERDMAN, WILLIAM C.;GARBARINI, VICTOR C.
分类号 C01B33/12;C23F1/10;C23F11/04;C23F11/14;G03F7/30;H01L21/00;H01L21/308;H01L21/311 主分类号 C01B33/12
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