发明名称 PRODUCTION OF MASK
摘要 PURPOSE:To obtain a mask which permits etching of patterns exactly opposite from conventional ones by depositing a metal chromium film on a glass substrate, then converting part thereof to a chromium oxide film and etching the metal chromium film and chromium oxide film with th pattern of the silicon oxide film provided thereon as a mask.
申请公布号 JPS5382269(A) 申请公布日期 1978.07.20
申请号 JP19760157358 申请日期 1976.12.28
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 JINNO KIYOKATSU
分类号 H01L21/302;G03F1/00;G03F1/54;H01L21/027 主分类号 H01L21/302
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