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经营范围
发明名称
PRODUCTION OF MASK
摘要
申请公布号
JPS5382268(A)
申请公布日期
1978.07.20
申请号
JP19760157357
申请日期
1976.12.28
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
JINNO KIYOKATSU;KINOSHITA HIROSHI
分类号
H01L21/302;H01L21/027;H01L21/3065;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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