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发明名称
摘要
申请公布号
JPS5328473(Y1)
申请公布日期
1978.07.18
申请号
JP19750173772U
申请日期
1975.12.24
申请人
发明人
分类号
G01N23/225;H01J37/252;(IPC1-7):G01N23/225
主分类号
G01N23/225
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代理人
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