PROCESS FOR MAKING PATTERNS IN RESIST AND FOR MAKING ION ABSORPTION MASKS USEFUL THEREWITH,申请号US19770794288-传众专利搜索

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发明名称	PROCESS FOR MAKING PATTERNS IN RESIST AND FOR MAKING ION ABSORPTION MASKS USEFUL THEREWITH
摘要
申请公布号	US4101782(A)	申请公布日期	1978.07.18
申请号	US19770794288	申请日期	1977.05.05
申请人	HUGHES AIRCRAFT COMPANY	发明人	SELIGER, ROBERT L.
分类号	G03F7/20;H01L21/027;(IPC1-7):B05D3/06	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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