发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To secure a high-density integration for the logic circuit comprising plural I<2>L, by isolating the element through the pinch effect and without using the element isolation region which occupies a large area.
申请公布号 JPS5380177(A) 申请公布日期 1978.07.15
申请号 JP19760156920 申请日期 1976.12.25
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 SHINOZAKI SATOSHI
分类号 H01L27/082;H01L21/331;H01L21/8226;H01L27/02;H01L29/73 主分类号 H01L27/082
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