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发明名称
COLD CATHODE PENNING TYPE GAUGE FOR MONITORING VACUUM LEVEL IN A SPUTTERING PROCESS
摘要
申请公布号
US3447072(A)
申请公布日期
1969.05.27
申请号
USD3447072
申请日期
1966.12.22
申请人
NATIONAL RESEARCH CORP.
发明人
DEANE P. SHELDON
分类号
H01J41/06;(IPC1-7):G01N27/62
主分类号
H01J41/06
代理机构
代理人
主权项
地址
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