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经营范围
发明名称
ELECTRON LENS
摘要
申请公布号
JPS5379369(A)
申请公布日期
1978.07.13
申请号
JP19760154998
申请日期
1976.12.24
申请人
FUJITSU LTD
发明人
YASUDA HIROSHI
分类号
H01J37/141;H01J37/14;H01L21/027;H01L21/26
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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