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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5378182(A)
申请公布日期
1978.07.11
申请号
JP19760153374
申请日期
1976.12.22
申请人
HITACHI LTD
发明人
KAMIGAKI YOSHIAKI;HORI RIYOUICHI
分类号
H01L29/78;H01L21/22;H01L21/225;H01L29/06
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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