METHOD OF FINELY WORKING THIN FILM,申请号JP19760152953-传众专利搜索

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发明名称	METHOD OF FINELY WORKING THIN FILM
摘要
申请公布号	JPS5378076(A)	申请公布日期	1978.07.11
申请号	JP19760152953	申请日期	1976.12.21
申请人		发明人
分类号	H05K3/02;C23F1/00;C23F1/02;H01L21/302;H01L21/306;H05K3/06;H05K3/46	主分类号	H05K3/02
代理机构		代理人
主权项
地址

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