METHOD AND APPARATUS FOR LIQUID PHASE EPITAXIAL GROWTH,申请号JP19760152902-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR LIQUID PHASE EPITAXIAL GROWTH
摘要
申请公布号	JPS5376979(A)	申请公布日期	1978.07.07
申请号	JP19760152902	申请日期	1976.12.21
申请人	FUJITSU LTD	发明人	KUSUKI TOSHIHIRO
分类号	C30B19/00;H01L21/208	主分类号	C30B19/00
代理机构		代理人
主权项
地址

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