| 摘要 |
PURPOSE:To obtain a high-quality liquid crystal cell substrate without contaminating a transparent substrate, etc., by allowing ion to collide with an organic film and adding directivity in the case of the orientation of liquid crystal molecules so that processing for orientation may be performed. CONSTITUTION:A substrate holder 25 provided in the etching part 21 of an ion beam etching device 1 is mounted with a substrate material 11a, which is obtained by applying the organic film being the material of an orientation film 7 on the surface of the glass substrate 3 where a transparent electrode 5 is formed at the middle stage of producing a liquid crystal display device 2. Then, a part of the organic film applied to the surface of the substrate material 11a is etched by allowing argon ion C to collide with the organic film and the orientation film 7 is formed by adding the directivity to the liquid crystal molecules on the surface of the organic film. Thus, the excellent uniformity of the orientation is obtained regardless of the kind of the material of the liquid crystal and the substrate, etc., is prevented from being contaminated. |
