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发明名称
摘要
申请公布号
DE2509108(B2)
申请公布日期
1978.07.06
申请号
DE19752509108
申请日期
1975.03.03
申请人
BOKOV, JURY SERGEEVITSCH
发明人
BOKOV, JURY SERGEEVITSCH
分类号
C03C21/00;C03C23/00;G03F1/00;(IPC1-7):G03FX/;H01L21/31;H01L21/70
主分类号
C03C21/00
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代理人
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