| 发明名称 |
EXPOSURE UNIT |
| 摘要 |
PURPOSE:To enable the positioning between the mask and the object even under exposing work by means of intermittent flashing, in the exposure unit providing the positioning section using the oscillating slit method. |
| 申请公布号 |
JPS5375774(A) |
申请公布日期 |
1978.07.05 |
| 申请号 |
JP19760151615 |
申请日期 |
1976.12.16 |
| 申请人 |
FUJITSU LTD;NIPPON TELEGRAPH & TELEPHONE |
发明人 |
FUSHIDA YOSHIROU;SHIRATORI TAKANAO;HIYANE MASAO;SAITOU TADAO;ISHIHARA SUNAO |
| 分类号 |
H01L21/30;H01L21/027;H01L21/68 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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