| 摘要 |
The device includes a spatial light modulation section 10 having a phase modulation plane 10a to which laser light L1 in a wavelength region longer than an ultraviolet region is input, and on which a phase of the laser light L1 is modulated at each of a plurality of two-dimensionally arrayed regions, to generate modulated laser light L2, a wavelength conversion section 20 having a light incident plane which receives the modulated laser light L2 output from the spatial light modulation section 10, and converting a wavelength of the modulated laser light L2 into a wavelength in the ultraviolet region, and an image transfer optical system 30 coupling the phase modulation plane of the spatial light modulation section 10 and the light incident plane of the wavelength conversion section 20, so as to be optically conjugate systems to each other. Thereby, a wavelength conversion type spatial light modulation device capable of outputting spatially phase-modulated ultraviolet laser light, and reducing influence onto the spatial light modulation section is realized. |
