发明名称 CORRECTION FILTER FOR ILLUMINANCE DISTRIBUTION
摘要 PURPOSE:To correct uneven illuminance distribution on the surface of the object to be illuminated, by inserting a filter between the light source and the object and controlling the transmission amount in accordance with the illuminance.
申请公布号 JPS5374379(A) 申请公布日期 1978.07.01
申请号 JP19760149764 申请日期 1976.12.15
申请人 FUJITSU LTD 发明人 IGARASHI KOUJI
分类号 H01L21/30;G03B27/00;G03B27/02;G03F7/20;H01L21/027;H01L21/302 主分类号 H01L21/30
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