METHOD OF GENERATING MASK FOR MULTIILAYER IC,申请号JP19770136360-传众专利搜索

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发明名称	METHOD OF GENERATING MASK FOR MULTIILAYER IC
摘要
申请公布号	JPS5374380(A)	申请公布日期	1978.07.01
申请号	JP19770136360	申请日期	1977.11.15
申请人	IBM	发明人	GOODON HAABAATO MEI
分类号	G03F7/20;H01J37/304;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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