| 发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE |
| 摘要 |
PURPOSE:To enhance the electrical property by exfoliating totally the insulator mask used for diffusion to form newly an oxide film which is not contaminated by alkali ion, etc. and further by forming a protective film on the oxide film. |
| 申请公布号 |
JPS5374384(A) |
申请公布日期 |
1978.07.01 |
| 申请号 |
JP19760150454 |
申请日期 |
1976.12.15 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
YONEZAWA TOSHIO;ISHIDA HIDEKUNI;YASUJIMA TAKASHI |
| 分类号 |
H01L29/73;H01L21/316;H01L21/331;H01L29/06 |
主分类号 |
H01L29/73 |
| 代理机构 |
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代理人 |
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