| 发明名称 |
MANUFACTURE FOR SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To correctly and easily implant the film layer to the concave part of the substrate, by heating and extending the photo sensitive resin layer in the concave part, after it is provided with a part of the concave part formed on the surface of the film layer surface. |
| 申请公布号 |
JPS5373972(A) |
申请公布日期 |
1978.06.30 |
| 申请号 |
JP19760150489 |
申请日期 |
1976.12.14 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
UENO ATSUSHI;EZAKI TAKEYA |
| 分类号 |
H01L21/306;G03F7/40;H01L21/027;H01L21/302;H01L21/31 |
主分类号 |
H01L21/306 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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