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发明名称
FORMATION OF FINE ELECTRODE WINDOW
摘要
申请公布号
JPS5373085(A)
申请公布日期
1978.06.29
申请号
JP19760149096
申请日期
1976.12.11
申请人
FUJITSU LTD
发明人
OOYAMA YUKIHIRO;NISHIMOTO KEIJI
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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