发明名称 METHOD OF PRODUCING SEMICONDUCTOR
摘要 <p>A method of fabricating semiconductor components having electrodes and terminals. The method includes preparing an undivided semiconductor wafer having at least one pn-junction; etching a grid pattern of grooves into at least one side of the undivided wafer, thereby forming mesas with concave side surfaces and elevations with upper surfaces bounded by closed rounded curves; coating the exposed lateral surfaces of the etched mesas with a passivating layer; metallizing the upper surfaces of these elevations, thereby providing ohmic contacts for the undivided semiconductor wafer; and breaking the undivided semiconductor wafer into individual semiconductor chips along the lines of the etched grooves.</p>
申请公布号 JPS5373083(A) 申请公布日期 1978.06.29
申请号 JP19770148701 申请日期 1977.12.09
申请人 发明人
分类号 H01L29/74;H01L21/301;H01L21/60;H01L21/78 主分类号 H01L29/74
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