| 发明名称 |
FINE ADJUSTMENT MECHANISM OF ELECTROMAGNETIC DRIVING TYPE |
| 摘要 |
PURPOSE:To perform the fine adjustment of positions by making the moving displacement of a stage to applied magnetomotive force. |
| 申请公布号 |
JPS5373078(A) |
申请公布日期 |
1978.06.29 |
| 申请号 |
JP19760149544 |
申请日期 |
1976.12.13 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
OOTSUKA NAOJI;SAITOU TADAO;WATANABE HIDEO |
| 分类号 |
H01L21/027;G05D3/00;H01L21/68;H02N15/00 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
