发明名称 Combination glass/low temperature deposited Si{hd w{b N{HD x{b H{HD y{b O{HD z {b passivating overcoat with improved crack and corrosion resistance for a semiconductor device
摘要 A semiconductor device including a body of semiconductor material with a metallic conductor disposed thereon has a combination glass/low-temperature-(typically 300 DEG C) deposited SiwNxHyOz passivating overcoat with improved crack and corrosion resistance. This nitride is formed over the conductor, with the glass over the nitride.
申请公布号 US4097889(A) 申请公布日期 1978.06.27
申请号 US19760737850 申请日期 1976.11.01
申请人 RCA CORPORATION 发明人 KERN, WERNER;TRACY, CHESTER EDWIN
分类号 H01L21/314;H01L21/318;H01L23/29;H01L23/31;H01L23/485;H01L23/532;(IPC1-7):H01L29/34 主分类号 H01L21/314
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