发明名称 Method of orienting objects using optically smeared images
摘要 The orientation of an industrial part such as a microcircuit chip having a pattern of dominant parallel lines is determined by an optical method. An image of the parallel line pattern is smeared or defocused in a known direction such that the resultant smeared image of the part reveals the lines in sharp detail when they are parallel to the known direction of smearing and are blurred if the lines are angularly displaced from the known direction. By rotating the image of the pattern relative to the smear direction and determining the angle at which maximum sharpness occurs, the angular orientation is determined. By correlating the pattern of sharp lines of the smeared image with a similar reference pattern of known position, the positional orientation of the part is also determined. When two angularly displaced families of parallel lines are present on the object, positional coordinates relative to two axes are determined.
申请公布号 US4097750(A) 申请公布日期 1978.06.27
申请号 US19770779158 申请日期 1977.03.18
申请人 GENERAL MOTORS CORPORATION 发明人 LEWIS, ROBERT W.;JOSEPH, BERNARD W.;FAXVOG, FREDERICK R.
分类号 H01L21/68;(IPC1-7):G01N21/30 主分类号 H01L21/68
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