| 发明名称 |
RETICULE WASHING EQUIPMENT |
| 摘要 |
PURPOSE:To wash reticule in a short time holding the reticule by supplying washing liquid to one couple of revolving brushes. |
| 申请公布号 |
JPS5371565(A) |
申请公布日期 |
1978.06.26 |
| 申请号 |
JP19760146521 |
申请日期 |
1976.12.08 |
| 申请人 |
HITACHI LTD |
发明人 |
KAWANABE TAKAO;KOGA KAZUO |
| 分类号 |
H01L21/304;G03F1/82;H01L21/302 |
主分类号 |
H01L21/304 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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