| 发明名称 |
MANUFACTURE OF FILM CARRIER |
| 摘要 |
PURPOSE:To ensure a hifh-accuracy manufacture of a film carrier featuring a high density and complicated shape, by using any adhesive without any mechanical manufacture processor nor etching process. |
| 申请公布号 |
JPS5368072(A) |
申请公布日期 |
1978.06.17 |
| 申请号 |
JP19760142867 |
申请日期 |
1976.11.30 |
| 申请人 |
FUJITSU LTD |
发明人 |
TAKEDA YUUKICHI;KUROSAWA KEIJI;KAWAMATA HARUO;ISOZUKA HIROSHI;NAKAI MASANORI |
| 分类号 |
G03F7/26;G03C5/00;H01L21/60 |
主分类号 |
G03F7/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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